高度集成 大尺寸晶元 无损检测 时域光谱 TDS 易操作

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商品描述

该时域光谱系统专为晶元电子特性的无损检测而设计,最大检测晶元可达6英寸,检测采用反射式结构,系统集成性好,操作简易方便。

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性能参数
性能参数
Measurement system THz Time-Domain Ellipsometry
Measurement signal Time waveform of the electric field strength
Output data Ellipsometric parameter,complex refractive index/complex dielectric constant/electric conductivity using analysis program
Sample arrangement Horizontal configuration (measurement surface ? Upwards looking)
Measurement zone (output range using standard reference material) above 0.5~3 THz
femto - second pulsed laser Center wavelength near 780 -800 nm and pulse width less than 100 fs (*an external laser source can be used)
PC requirements The PC (above) requires 1 wired LAN port and 2 USB ports for connection to the Tera Evaluator.
Software Measurement Software and Analysis Software
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应用实例
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SiC衬底的分布测量
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GaAs外延层测量